RF-Sputtering materials
Targets:
Targets:
SiO2; TiO2; HfO2; GeO2; ZrO2; TeO2; ZnO; ITO; W; WO3; SnO2
Protocols for binary systems:
Protocols for binary systems:
SiO2-TiO2; SiO2-HfO2; SiO2-GeO2
Rare earths:
Rare earths:
Er; Yb; Dy; Eu; Ho; Nd; Sm; Tb; Tm