RF-Sputtering materials

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Facility

Applications

Materials

Principles

Targets:

SiO₂; TiO₂; HfO₂; GeO₂; ZrO₂; TeO₂; ZnO; ITO; W; WO₃; SnO₂

Protocols for binary systems:

SiO₂-TiO₂; SiO₂-HfO₂; SiO₂-GeO₂

Rare earths:

Er; Yb; Dy; Eu; Ho; Nd; Sm; Tb; Tm

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