Targets:

SiO₂;  TiO₂;  HfO₂;  GeO₂;  ZrO₂;  TeO₂;  ZnO

Protocols for binary systems:

SiO₂-TiO₂;  SiO₂-HfO₂;  SiO₂-GeO₂

Rare earths:

Er;  Yb;  Dy;  Eu;  Ho;  Nd;  Sm;  Tb;  Tm