RF-Sputtering materials

RF-Sputtering applications RF-Sputtering principles

Targets:

SiO2;  TiO2;  HfO2;  GeO2;  ZrO2;  TeO2;  ZnO



Protocols for binary systems:

SiO2-TiO2;  SiO2-HfO2;  SiO2-GeO2



Rare earths:

Er;  Yb;  Dy;  Eu;  Ho;  Nd;  Sm;  Tb;  Tm