RF-Sputtering materials

Targets:

SiO2; TiO2; HfO2; GeO2; ZrO2; TeO2; ZnO; ITO; W; WO3; SnO2

Protocols for binary systems:

SiO2-TiO2; SiO2-HfO2; SiO2-GeO2

Rare earths:

Er; Yb; Dy; Eu; Ho; Nd; Sm; Tb; Tm